Ultrapure Water Quality

Conductivity  

Conductivity ≤0.055μS/cm@25℃

Resistivity  

Resistivity 18.25MΩ.cm@25℃

Heat Source   

﹤0.001Eu/ml

Microorganisms  

﹤1cfu/ml

Total Organic Carbon

TOC：1-3ppb

Metal Cations

Content (ppb)

Fe (Iron) <0.005     Cu (Copper) <0.005     Al (Aluminum) <0.005     Ni (Nickel) <0.005

Zn (Zinc) <0.02      Cr (Chromium) <0.005     Na (Sodium) <0.01      K (Potassium) <0.02

Anion Content

(ppb)

Cl⁻ (Chlorine) <0.01           NO2⁻ (Nitrite) <0.02  

NO3⁻ (Nitrate) <0.02     SO4²⁻ (Sulfate) <0.01