Ultrapure Water Quality

Conductivity    

Conductivity ≤0.055μS/cm@25℃

Resistivity    

Resistivity 18.25MΩ.cm@25℃

Heat    Source

﹤0.01Eu/ml

Micro Organism isms

﹤1cfu/ml

Total Organic Carbon

TOC: ﹤5ppb

Metal Cation

Content (ppb)

Fe (Iron) ﹤0.005    Cu (Copper) ﹤0.005    Al (Aluminum) ﹤0.005    Ni (Nickel) ﹤0.005

Zn (Zinc) ﹤0.02     Cr (Chromium) ﹤0.005    Na (Sodium) ﹤0.01     K (Potassium) ﹤0.02

Anion Content

(ppb)

Cl⁻ (Chlorine) ﹤0.01          NO2⁻ (Nitrite) ﹤0.02 

NO3⁻ (Nitrate) ﹤0.02    SO4²⁻ (Sulfate) ﹤0.01